KOU , M.; ZHOU , H.; HAO , Y.; LV , Y.; JIANG , J. An Uncertainty Analysis of Downward Pressure Applied to the Wafer Based on a Flexible Airbag by a Double Side Polishing Machine. Instrumentation, [S. l.], v. 10, n. 2, 2023. DOI: 10.15878/j.cnki.instrumentation.2023.02.006. Disponível em: https://instrumentationjournal.com/index.php/instr/article/view/11. Acesso em: 23 feb. 2025.