ZHANG, Z.; TIAN, Z. CNN-ALSTM Soft-Sensing Model for Resistivity Gradient in CZ Monocrystalline Silicon Wafers. Instrumentation, [S. l.], v. 12, n. 2, 2025. DOI: 10.15878/j.instr.202500277. Disponível em: https://instrumentationjournal.com/index.php/instr/article/view/277. Acesso em: 1 apr. 2026.