KOU , Minghu, Huiyan ZHOU, Yuanlong HAO, Yue LV, and Jile JIANG. “An Uncertainty Analysis of Downward Pressure Applied to the Wafer Based on a Flexible Airbag by a Double Side Polishing Machine”. Instrumentation 10, no. 2 (August 20, 2023). Accessed February 23, 2025. https://instrumentationjournal.com/index.php/instr/article/view/11.